• Explores the technology of fabrication and manufacturing of engineering materials at the micro- and nanoscale
• Describes the construction of microscale components using established lithographic techniques
• Focuses on bulk and surface micromachining techniques used for producing features
• Explains processes for shaping materials to produce mass products and the fabrication of master molds
• Introduces the concepts of deposition of thin solid films and pulsed water drop machining

With increased activity in nanotechnology driven by economic necessity, this book focuses on the technology of fabrication and manufacturing of engineering materials at the micro- and nanoscale. The text describes the construction of microscale components using lithographic techniques, providing examples of LiGA and deep x-ray lithography. It presents bulk and micromachining procedures used for producing features, manufacturing methods such as ejection molding, and the processes used to fabricate master molds for subsequent operations. Additional material introduces new concepts including the deposition of thin solid films onto the surfaces of special tools and pulsed water drop machining.